Maximized flow rate with next generation all fluoropolymer membrane filter cartridges. A unique PTFE membrane provides superior flow rate, surface area and efficiency maximizing the performance of the all fluoropolymer Advantage™ AF+ membrane filter cartridge. The Mega-Pure Advantage AF+ series of filter cartridges meets or exceeds the requirements for the filtration of UHP liquids used in the fabrication of state-of-the-art microelectronic devices.
The Mega-Pure Advantage AF+ Membrane Series is available in 0.05µm, 0.1µm, 0.2µm, 0.45µm and 1µm pore sizes.
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Applications
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UHP Water | UHP Chemicals |
Ozonated | Acids |
Cold | Solvents |
Hot | Photoresists |
Alkalies | |
Developers | |
Mixed Acids | |
Strippers | |
Equipment | |
Point-of-Use Tools | |
Chemical Delivery System | |
Cleaning | |
Etching | |
Photolithography | |
Wet Benches |