Increased flow rate with next generation, all fluoropolymer membrane filter cartridges. A unique PTFE membrane provides superior flow rate and efficiency maximizing the performance of the fluoropolymer Advantage™ AF filter cartridge. The Advantage Mega-Pure AF series of filter cartridges meets or exceeds the requirements of the filtration of UHP liquids used in the fabrication of state-of-the-art microelectronics devices.
The Mega-Pure Advantage AF Membrane Series is available in 0.05µm, 0.1µm, 0.2µm, 0.45µm and 1µm pore sizes.
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Applications
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UHP Water | UHP Chemicals |
Ozonated | Acids |
Cold | Solvents |
Hot | Photoresists |
Alkalies | |
Developers | |
Mixed Acids | |
Strippers | |
Equipment | |
Point-of-Use Tools | |
Chemical Delivery System |
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Cleaning | |
Etching | |
Photolithography | |
Wet Benches |