Twice the flow and recirculation rate with next generation PTFE membrane filter cartridges. Mega-Pure PTFE membrane filter cartridges provide unsurpassed flow rate capabilty. Parker’s PTFE membrane cartridge outperforms all competitive cartridges of the same rating at a ratio of 2:1 or greater, thus reducing the number of cartridges and housings required. PTFE membrane filter cartridges are a low-cost alternative to all fluoropolymer cartridges. The Mega-Pure PTFE Membrane Series of filter cartridges meets or exceeds requirements for the filtration of UHP liquids used in the fabrication of state-of-the-art microelectronic devices.
The Mega-Pure PTFE Membrane Series is available in 0.05µm, 0.1µm, 0.2µm, 0.45µm and 1µm pore sizes.
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Applications |
UHP Chemicals |
Acids |
Solvents |
Photoresists |
Tank Vents |
Etchants |
Alkalies |
Developers |
Strippers |
Recirculation |
Wet-etch Systems |
Rinse Baths |
Process Gases & Compressed Air |
Polymer Filtration |