High flow rate capability with polyethersulfone membrane filter cartridges. Mega-Pure polyethersulfone membrane cartridges provide superior flow rates over the competition. The unique construction features a high-surface area design that allows for excellent flow rates and high partical removal efficiency. Hydrophilic polyethersulfone membrance cartridges require no prewetting and are ready to use. The Mega-Pure Polyethersulfone Membrane Series of filter cartridges meets or exceeds requirements for the filtration of UHP liquids used in the fabrication of state-of-the-art microelectronic devices.

The Mega-Pure Polyethersulfone Membrane Series is available in 0.03µm, 0.1µm, 0.2µm, 0.45µm and pore sizes.


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Applications

 

UHP Water UHP Chemicals
Central PAD Specialty Chemicals
Polishing Stations Point-of-Use
Point-of-Use Bulk Photoresists & Solvents
Microelectronics
Semiconductor
Optical Disks
Hard Disks
Printed Circuits